The SuperView WX series white light interferometric probe is a non-contact precision optical probe developed based on white light interferometry and precision scanning. It is mainly composed of an optical interferometric system and a Z-axis scanning system. It is small in size, light in weight, and portable. It can be easily mounted on various platforms with XY horizontal displacement architectures to perform automated measurements on device surfaces on the production line, directly acquiring 2D/3D parameters related to surface quality, such as roughnessand contour dimensions.

1) Measurement function: A single scanning mode can meet the measurement of all types of sample surfaces, from ultra-smooth to rough, mirror to fully transparent or black materials;

2) Analysis function: Able to obtain 2D and 3D data on surface quality, such as roughness, micro-nano level contour dimensions;

3) Batch analysis: Data processing and analysis templates can be customized according to the required parameters, and one-click batch analysis can be achieved for the same type of parameter data;

4) SDK software: SDK software and interface documents are provided to facilitate customers to integrate into their own machines or equipment for control applications;

5) Environmental noise evaluation: It has an environmental noise evaluation function with a resolution of 0.1nm, which quantitatively detects the noise amplitude and frequency of the instrument affected by the external environment, providing a quantitative basis for equipment debugging and troubleshooting;

6) Optical Source safety function: The light source is set to automatically turn off the light when unattended. When the mouse track is detected to be unchanged for a long time, the light source will be automatically turned off to prevent the light source from overheating and damage, and effectively extend the service life of the light source;

7) Lens safety function: Double anti-collision protection, software ZSTOP anti-collision protection, after setting, the current position is used as the lower limit of displacement, and it will no longer move down and accompanied by an alarm sound; the equipment is equipped with a pressure sensor, and a spring structure is designed at the lens to ensure that when the lens collides, it will elastically retract and enter the emergency stop state, greatly reducing the impact of the collision, effectively protecting the lens and scanning axis, and eliminating the safety risks of human operation.